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  3. ISO/TR 15969:2021 PDF

ISO/TR 15969:2021 PDF

ISO/TR 15969:2021 PDF

Name:
ISO/TR 15969:2021 PDF

Published Date:
03/01/2021

Status:
Active

Description:

Surface chemical analysis - Depth profiling - Measurement of sputtered depth

Publisher:
International Organization for Standardization (Technical Report)

Document status:
Active
Format:
Electronic (PDF)
Delivery time:
10 minutes
Delivery time (for Russian version):
200 business days
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Choose Document Language:
$37.2
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ISO/TR 15969:2021 provides guidelines for measuring the sputtered depth in sputtered depth profiling. The methods of sputtered depth measurement described in this document are applicable to techniques of surface chemical analysis when used in combination with ion bombardment for the removal of a part of a solid sample to a typical sputtered depth of up to several micrometres. The depth typically determined by this approach is between 1 nm to 500 µm.
Edition : 2nd
File Size : 1 file , 1.7 MB
Note : This product is unavailable in Ukraine, Russia, Belarus
Number of Pages : 20
Published : 03/01/2021

History

ISO/TR 15969:2021
ISO/TR 15969:2021
Published Date: 03/01/2021
Surface chemical analysis - Depth profiling - Measurement of sputtered depth
$37.2
ISO/TR 15969:2001
ISO/TR 15969:2001
Published Date: 06/01/2001
Surface chemical analysis - Depth profiling - Measurement of sputtered depth
$21.9

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